PK рk:Collect 6.1//MFM CALIBRATION/PKk:E@G'Collect 6.1//MFM CALIBRATION/Method.stpV1'(Hb$wm"It ] BOû\#fbZ{0RZjvƖy9 *ϕ^D;88xMMEsSTd6%qPCX&30KE@5Dj[>x+RafYPc*/!4\qX}83 8kHPِ1'u7 e:wWqH<9g,,Sh{Ҩ3J,JhJ;񧼤 Gwj<D%9?j{8 2RcAJExRAk,ފR'AGPi-ّ@g?SU+\9ֻjmpjPUtŧ^]xٳ͜?CP.+eT:hҥZjSeP9kPKq`f::Sr/Collect 6.1//MFM CALIBRATION/MethodTemplate.xls\{p\gu?ww%lKe[%{%Oڲe'e#y*kim vjE$+:@^J4MFW2-3ВvL[fh&sw{^iyuιw;w􍿏kKt˕Tn dD_S/M_Aѧ8},IގP>٩ŅTvz,& PG(B=*,P-=Gt 6$Fϰ:3^C9ϖu*%qZ%q=5dLzii>3>g}G}I{Ec>>>'|g}|k>|/K;p#N֛cWB[ _^zAp Xzz]_)_̸Nrˈ&Myöޔr& w˯ILneKA9|7?5W7CG7%_ϭm=I-syI;CzN Hou'Pu&~ɉWzry1 U'^+>z*}p~]郋[x Ukʧ#o/S£ %G z#:9}䣨SĴ}ws)AluꏋP?ȥe}$N?Ѷe~^-gՐ<_vpk>$}2uWW+!PKX6J0-=Jf.# ڑ#|0Wa21btb6s95󹤴S1&qz:=!:pLd퓳tYO\m6TcQQ.sf8L2=o#RUTf>:>~j|W%r Ҏ,ӹ‚U{nTjL^U`WUCLf6ώ0% SE+ZF?<ӾrH?⓵h;z< t` /aKu$J30[@?G_J'7<"Ph"fz +;8ǒs)H/gd8ǒ "7 2g]:N)L*]ufdc5dbJdGrW'}qTyrtDflZ?S1ƃYl2g`.s C_sezq>ov7 \OóehH675ڎ맓tr:ի^Xc7=]K}{vx+z>>sQI}AKg|:O>j_57-)齨)!~]Ld:S<}:ٸg O,s)|*g*螛4P8, FG{"zL1 \h>klb3NEx 7@'pW23i:Aɋ' 0ΩBjau_9UWOo NQ3IK"f+x^!gx\%4 &y*^\uL?֍_MaG/x>gFqCYFs:"+5gwoϋU)_Nnstq~'p᳂o|&6EtrjT&]!'yw Me23;saL>W6A3YrMƂSˑL04{`Xkd k4ICA^a|p>`$2N{&:JPi i~v{ց |JYviK4UU >'P"+E9%E^\k HM(ߥđq;#o59"E~}WHrnዟ&^J3i;ϽnCykw5siɝJJj~Ȯ&Tbr5:CƑ1}-j/9<2rzww +VH5R/U[UΕw |-}MWS^Z)>qO#Ω&/܀`#c y`eXV၅[ VV% ="Xy`X5y`͂9|"ؐkOMCnMάcΣvl`dlznHщuhr6KOQ^ 0~& 4{JC@yX>.<W䤔k i5'pMxA1.V4 q589,)g*+I|U)QH#Of>r7ґZ &ZBʾ-UF_i@[8H8p@k) :Z58xca,Tyt s54Ew@ Xܚ7*}e꫶UJ_C_q!^ }!~uu #FO[k,5;t׈Jw֕OjV/{eȫQLJ听׊~eu& }HVPuZuJ]RW 8W\USԴS/ =֫:[KymM*GcV 1Bo/gbRCLXF=c[EnXQ +z9zm%1QW[Pr`e!4^3!;T&?z6#W,<5ct=@9Rf&랡&^ ɜǏ;ޯjA ,IO \\ŅUX\*fp"KVV пV4Ez'1CKcOV)sntZMt)mwn3nÿkD绰sT\3K).S!:;~Z:EG啮ޣV:{fO~%}y8:\ztjMʵX΃@l kfu{ԉO-uy`<z;nl<^vT#Cv x=]T|R z`<ؐv;Hcy 0rG8[ԸCjcIR]JStgw݁g^;@G-a>}¹WE]=׽iպYjsIR[\R'=KS֒$[T_IRK͈q8݁IyށI\~5Kߪ\`:@8(.')^j ؍nӰH6:E~~r~̤~jT9W:|z;̳2eg 7L]jK5PyrT-'0PjSR#D̐侹ܮ*8V!'[{ѹ5.I._t>ΪWW{KIܸ juATSۨݜfQ\zzaLjguoJl%6J$+uf@?X%3A}3s^% k+s?u44: k.V;V7Bȏ1Z ydH9LS&W͂F?^ua:تyv!e]W$N1XAA;j|Ǒ"5=hBIw ݢ4tq_tDu:l%GphC-:rh=r>ԓO"TGEx)`nUP*{:"gK_,/ AvvVcIڏϭY{5԰PWo׉E#_ m~C5ome蠽U@1Shb,UcoFWCbA]B[?%Ԏ]ˀG==#Af8"r[p(yxpD;L!~ӧ~)`O_VF9֭{ 4)L7M+oh3S@S TmFA 5 ՟`VޚϊP5KBdo}BBDB;1D^&J&%RMqq884T$1ܱs'0wbϝ\k asg);CsǶyQ4նy⚪d#V!eP3-(C5!(p:IsN33 xztCXϰXnȧOAghC9x 0oFR*5fE c'x?k˞!c7 `RDYRaZA0a:Lc -֊fZh#8p(:s):Xk8p`]h uX):(:XGh9U|:1'wup.O~g|PhpW'kD DdВ ZAK5himAK7hmAm2 ZAcв ZAkr ZA7h x63 D6ɠmAij%}%`-Is.sn)MI60єds.\6F9`X?$&u9%qDTk"XWR*5X5Κh`M `M*DKI`]C0$Tk&i5 uYRa`@0dbMX8k5%5-uXS@0bMX9k555[-u+XSRaĚpTkZkX#HΚ cMNJkƚY #XGus֑`M0֑`C0֑:RcM# f`݋h5(ƚ cMhYGrtkF@]3zFq TkXQ*5X34tΚ!Y՟O6Q`AvќuX]AT(SauƚYGXGker`ThFR*u4XGqLF!Zgk7JfM0LbXGsLkVk/DYڛRaY`C0,: 9k&g2 z-k,Xǀ5Racc4,: xD`MTk6XS(ƚ-Yѐْ56kPGs#XΚLJ5Ra9Ěfsֱ`G\: c BJ%ֱkgk` `kq\R*5e c%\u,g5Y6cksJˍАr<:L``h8k>XP*5 c'|5X"DYǁu Xǁu)X853`e6rJ J'8::!uXW"ZgU c5 c@4u kLZu c-zJk:X `=m"g=)z&X7Q*Lb=Sc-gX'NkMRaRauz&gh`: NvJNJN"ID:ZZ֝6uX RaZN⬅Ѧp`K0`G0:Yc-䬓 S,Xu?MSzRaSzRaSu:N1N ` CVYU0֩`u0֩:UcYj{GX']-{ 4VbJ נM7h3 ZA+7hg 2hʠUƠ4A3hs mAg1h vA;Ϡij }a΅b9W9OI60"hJ9WDsHsS+2Xh8k1X(Z n c-&bXNJ84T4T4bsi֒ARZVXKK0b-Xqkik)XYKO0R&P*XK5Zj`zh9 c5Ra^bjk`:96Nk>XRaӉu 3Xg8 Q*uXK):Xgh9 kYkXRae`Tki38k<>D;u.XRaZqrYgfrֳRagu X"ֳ4rzufL.E :(:):Xgjgq֙֊ @Y+)ZU c u&g0 `5VYgu-XguXg,2VVu=UqJnTk%X7R*X+5YZZMVY@0*nTkViZZ ֭6VuXRaZVqj`݁h5u6XwR*u6XwQ*u6X9lkMk Xw#Z-gJրu/XkFcYk `݇h>Z cJkZYk VX"ZgX}`TX}k-gXXB9TkXÂ0:bX}MvCŪab 0`s@E 09D8G#s³A 1r³A E 0³lp'<aoĘg*Y*fxدb3P{ؿQ(~3C:Uh~3\mms%_ŨW1v1/`vE&4۶Gfv⩪Tx5OknS^vC?901ss@B 0s@N 0sp'<a&b,AC 0 ̧|"  ,@s9Rp(Fh9"<7\"y\Q\VP\"JL7k+9DxK- ܏r[@x` %o![4›9-Dxk <8 - 0[AjOJjp[VaEDd3mʹUL[oum01Vs@E6# Z$ o#48mD:p5݈q;'\ ^d3 M%fpF&-²fbᄷC6#TbFx;ޮ o'5k@wp5 'a!5N )q''d3;@I%fw"3N ]NaIwjwr;»@Xk9] ,"R*1#wµ ,C9ZVׂJZp-'\Kw Bb \ \@%fwݜn"'#ƽ."%TbFxޣ !{RX 2 \N%f὜^"\@+>N+f@J:p'\G5q?'kfpGiqA1pٌ~n3~~Nx?>@7!zNfp >@hpp}znE9zn#v*1#\O5p=>@ w CA$>]TbF >> $‡nx>=d3‡@J h pblp?ٌa3‡aaN0n ƒ'Cd3 3 DA# 7#ЅrG@J6#|a3GN>@(#1N(#f0*_bF(>> %a7 lF{QcDF'|7naoMd[cE-F >4 Q`A-F[MP7-FqJVEPo6GfG,2yivض]8lm!7A-4e7>@8 N8Sf0>wF8>> ''a&blO0lFČ "|B#|>A71䄛@XH6#"*1#D4Mp>@$K)N$fOJ$'5'9DTS F9S \*1#|OOpb4p§AXO6#|Či"|Z#|>Mw3A+lО1h-9Aj^0h/ 6A{Šjж LA{ݠav7 [mӠc5h]}APLkLkL[ϴ̴dրVl5LkfZi .@N+fAVp3n7sDEX݌Bg93 \C6#|kDhۜ&.ߦ>+?,ςezYz˳`@d,j,r-lDo,[lƲ, T6ƲEcY,[s`J6c'XQ?5r4=Ys`Iec,i,q5 m,σe7ٌy졲159Ve+X8V#l~*c٪l,/h,/z{d3r_rq\τqO]ԏI5"OEyua[]\._^&r\eBMu)P]Χ.SeU%uiF]޲J.e\׳ PO}MR_/S u]VA<$uN SIuEPcGRv[v<ծ]\j]8NiQ;)jD턨v*~kll|[>/Sv5.7C.o-ˇryO.xǏ\S|&\˗h6_cEm,(Zڣ%>_Xt-ӆY^X^KzY^Kٌ%DOg٦lKz{lK76leƲ ^2XzX^K*cyYcyz{X+`1W4W8˫˫`Go9˫`I *cyUcylX%Y%lƲ,9T6Ʋ]cY^X^K>z{k`)148`)BoopRJ6cy,eT6:gyCcy,mgy,d37⣲17478eX梷79, K=Xvp757Y˛`YJec,oj,or4 Yr[`YAec,oi,oq5,oeٌm159Ne'X֢w8N#z*c٩,h,ez{d3wXX,j,Y˻`Jec,j,r4 ,e;ٌ=젲148.eXv9."n*c٥,k,ezd3XX,h,e?z|d3rX>X>,j,zY>hˇ`q򗍱||Ģ:uB:pv#AĠ1h mA }iо2h Aoо3h /Aɠ4h6h?_ !A͠5jSS1B1+>sj7TlNƜhlNn>?X>K$z|(G`Fӟ||Y>X>}Y>K/`Mec,k,sO4O,C6c,T6 g٣KzK<ٌeXleƲ|| g,d3OIec,j,r4>,%lX l339X ^9Xf,X>X>,{5`)Co_p` K5Xr/4/Co_r/2lXPKKԣ8˗`YD6c,KlKKX}+,#|T6g٧ 5gd3}`YEec,4}kkAopl5XQלGorol X6R77[[lBo9˷`i | -T6-gٯVgmd3`Nec,5;;@oslXvQww{{Fo?pl=XRCo8`O6c,lr@c9_XXEXpi, YP˿_6/_GGD8ˏ`$159OO`r&^T6g9KooE:buyĐC uju1B=4BUoGzduuA*n5̓cĂy`vȦٶq*c頱t,K$X梷%, f,`1H%tX:ezY:e ٌ#XRKG#g餱t2֙trK'1NK'Yc -t*Kg1KgDe-zYlT6Dq.Kl@o]9Kl$t&*c颱t,]5`i@oq`B6c T6UcYX6֍d3XX,4n`ىގ,l ,lҍ=;g9,{f,ǃeYk,Yٌ;XRKw;g9Ac9,Л `qXNXNhbQE9܎xDà4h IdvAmN5h Zm~#ߠ-֠ 4h `gІ oІm9_9Ɯ Ŭ8)7TlN1"ӟ)6|~Hփ(ˉ`FӟYzh,=Fo=9K"Ko*c顱,=5`zq`Xz%Xzj,=/i58u'xI/$PI/'9u2'9 $d3@I%c$'i$'q A_pAO6#9$T2FrFr2'9B՛") )1S4S8IoF$eTN$d3 1IoNr*#9$>u'9$sf$dINc$}IN"i YB%c$i$q YpAlFr:HS霤#+JI1>INHA}$ YK6#:*#H9I_F$W?N$f$}AJHj$}9I?F$ЗIٌHPI?'0Hmd3HSɈDBGhCGdPj$y*v*B ^JB @}hC @dP%BŲPuPul*D,@j Bx5Bf"TX, jBE`jBEB B6Y,`q<`rB F^4 B!To4bR3QrJ+=0(G}gcҳ^衩bf_(UWzFɕjavl,:4`m$lĶmx:B e"TC EYN5e`@L4@Y3*fYx*@ae0eͦL2lv&PxDZA6 P+iPI,TBBd* ֐B%!ZJJfjPl*6P,T P8JAMdP)@IS(GlSPa*lA4&a¤"6JI0i G0il& avR,H 3ava:3avŒD=, Naf/f0l&aS,L@h8@d0seaFQQ# G0E6 3 aBeaFS0clf,R,L.E"4arl&a(Y&!L0ySM6 0>Jɧ03 0l&a)Yf0p<3a.a!RJOa#24Ì,' %or/KՁvۓhN! A&DN6dl)0 a fQ0(X3)̙ '0g"F`aDMDL0 '0f Q0f+Q0($ن<$N,$A,L!)Dh8)D]D"n`a&S 0f/Q0fQ0S(ُSy)s(X)s(Xf*B"f*ˆ? 3a\~ jgE9ˊ 4VbJ נM7h3 ZA+7hg 2hʠUO3XfVk|Π1hgmA;Ǡ7h ڹ앰p{U>^ |n{&[_Z7p{6`/lA]h mA[b.1h RvA ]iЖ ܠ]kЮ3hvAɠ4h7[ ڭj0_gB`_ `o}!/ "n/"n_{ 싹}1쭰s{1mp{ /%wۗ 2n_{^ {7˹}9=¾W{*n_쫹}5샰5^E;ۮu2Z.طJɛ\?IkǰS4c(~g:?vZ?V:T&֮(`_#`_`G^aG7Fn}o Jn7웹}+>o[1`nu<؀Q{'CI]brnEn3h mAài2hk vA[g3h zA{Ƞ=l6G ڣ1Ѡà=nО0h ړ)Ɵ&i+6رWq{58طqvWs{ طs)pN]3as`a^{`.}.}/] {]>n?^~zn?{.0#Ga/{ǸaoW{'$57q)ka?am+Ymv|u=mMwlpJ7g ڳmAA{Π=oж ڋ%͠l^1h5A{à0ho mA{Ǡk3h Ɵ1ßn {n?{#~&p{ r`oOn?{總vs;`ow~/EnoK~۸ 콰_~a*_}vn ׸C_آm7a`[Caa~;aG~Ž߃  =n]vosC}``JVDZmvJ?2hO A̠}n/ ڗ+Ϡ}mо1h;A0h2h? AoAŠ2h ZƟf? {7?#n;;'v = v:O9L؟q{/؟s rKW a}`ao`® î-탽Þ ;n{}v=/؋`>{쟸oaϰW7>{_+5q7kaF`fJVFG[D;SwUà9 ZAs`bZPҠ2h ZA 7hm Z[aA4h Z'٠E.A;Πu3hMS3\?5c76pe;`o-v ؛`;;vq;Vn{n[;ۭ`ݒۭa݊awnp{`q 콰ù>m{?춶MOݟ7_?{ke"Fp5i%VG.W5i@M"jnnHآmwvG.ؑ;vGnw`G.#aGq+(]}nrl7}<^q;ް d#8G{g3p%zAaz^$vA;Š6h A6h} Z?1h ZA`b @6Ƞ 6hqmAj0hmAnFhja0?ςavs8'r'x= v> v ^>v:쓸} L's7اpT{s4O a>`hإp/2v_n{`WgJVg3ƹ?jCM`dgJ4Ѡ%dbR ZAi ZAeFLelc\g 86ޠM0hL6ѠM2hmAbЦjja|7Nv썰 {$nnT[`p; Vة {4n{$3`Qwhػ`v&ݰGs; ؙ{/,ng{ s`mJVgXjTe>{,`|"Ҷ= v>=`'pLؑ =v3= v7] {'S`=Sa=;7EhAfJ ZAmA+3h,6ӠUYҠUj6۠ZMS{>v>|TÎ]i`sv vrnτ],nW.=۳`®v%2س]vesWk(ڲjHv:-e^LVf[hLv RɁ[&[_ɢ C6`vn^ZD>fۙn*@sP5(\`]CjyjTX}ؙ4l(PZ` PcPm^ZD>jLk \6,ۢX$ ~wKO|& %Nr!.*\uw.)K[4H=#D)ZY}`aT>PYz|z\=!6EVdB<-Be>B>D#L>ɱcܱuJW)>]dۯ&P!x- [Y}[-u~8e=ƋnBM~j}Ub_;[DOY`8<牦JDJ .YeT#^)==褈D3O]W^=[soFBti\+j0;v w9\Eԅ,!βVUg8-AD>zz튔eS-C#qh-^hOQC YfT(I"WdD1F>z jE^Q#F}R/,G$[7Ddo[QeRVF}V_h2 OjR2ƌ! ׷]}E~[wg)J_veR,[U\YW\Q1BJ]uwnJyqEՌ wV[D2ꘜj6IZbrjJ1&SU_om$x7TUiRM+Yͪhk**YSUW-rZSc3d,+71R!F11YSSRU S2O/%sjNr %L,R;cb\~ZFUMK,)>0:;)1998F ̴ ڞ5S۷Dn)[?jx_yKO ;R?Bkp41-YLyOGj-^~uroJ̒#\+cc=oכnnnkk!L؈,fY#M#j5 8/{!A(mMVٲ{թ+!:[p\EYt]6ʡ\3")`RZ%#kLpZ~0d?}c+vu^{Ǫ> PgCrY"5rkZ"6éN޷g1X@.KvZ!Yzﳅ3*T+O?oP_gy[[-[ZD֢Δ]?lR<ɫPI638hϮjtl&GTNۉ~:&$C380da/Y4 t{X",B}|sg!.x߲]}(GY-FGtm2EκyU"ܲ6'}4AQ78[ƶo'^:zN}Y&F~,rr<ђJo\7^)w7"N38 e#2+;bU1gc6B.Weq3jkz\:ں>ڑg(R>-ڨD^*NN(`E T$$0$[,&3qTFI,booh{S__?wX "9翩>J=޶lW_ͳ[vl/+h(?OY3w- +TY#?QUy>2^+#VP'. "0XbaHT<_#ʠ]ep,[]eY'ȭt_|F/JH4"xX"I4b|ŭUWU1rS8cc`RdTGT.TeޒV t5(@_@v2\rI]ňm}$e&}e2~ы.3l/6SǫKZYݡd,TّӺdg,2Evuiٳe[5S4 _\WtԿ+jLOCbn+~g:Lv^eQu{7={Б i<6[N)|sUTΪWW{KIyڪwZqwfMtx䣻y)ٺ/#ϝ=.ߝLM!9hdյrO9N{a˭aO{=!]c;\6Vsu:$yqBռǶj[Q2 wE{.7AtݎQ6PwTZ,fnNak w?v˗r_f_3SLU#uvSk hӭy2ڇo8̭FL#n^"Z@{ao*zES,YRQ'K.QVmQ*eI}Q}uydm%ՙdvByLt:VQ+ W;4j6jBZW(9u&r\^)rQ{ݧE.Ͳ+~xKMMm2D.Cr֑0iaIu]g\=ir)ǝ8(Bmd [ұrj$8{ B 1INuELK\2M.%+r!OuS>ՙJuO:x|2#Ln='T̜VU1GxVKkΥ'ƓH&^Os/YQ5±="quZqV\-OxBNtXdCk“RVWɆ򽳪+Dϛ)luR]jVy9#ݚco]?F_{/gjMr:}ox&Ynw':}hG]ĽyZ>d}X{(׎vlR%;kpǞLPV +N2v֜O^D[횞_YtEVFo)WQWUʹ~;ic?߹yY'N=01-ڄT#6 C]j:D)A>W'-xڦCV]e2{ }z=uueAW'WOueƵ0Ԛ'm]uusX׸\Y=Y|J"~eZl;BȣҾ%8D_Sr D\')}w:ֻfbpjWE,&WUMh䊭oiU4 IC1z8Qܿ*c$%Kgu[Τj)uj6P|p کiZ(J%sjx+CEYKenXΞv'4wP\v[_ כR['|cs]\^+{{w[}=_=\3;FS'fMָㇻ<2oe ] [rS+Kӗ7ʯr{\-O g}ߔzͮV=2;+e>^9uх'/-VК:1ŕ3wS&WUqvi_gWEeYžKrDm O|Fx)>}uEQStS?/q/D|"[zr5wU׳n`?/"܏s֕GsՕ(yڐnt /'t 7X*[_G8j}Uۛj8e; =!;`"OȭNr:y{-NZߋpHÚ}9\RTG t?E71>)1,_$yV0g+5u\C+|[ D;OI]|CY{*ͽq/$\?£u-^Qt;US]sKG DM(?hyx: *.yR3BrK|O=?VUx)RϳO//vDbr~Ԃiwt=씌s")*%7FJwS/sDBdTz}U^uၴ^$gzg.D%m rs+F9䲾+=B>oᒟک.Bv Oݫj`F,(StTE*] 9X;ԩ=ۣ7`7;xzשlj7޲{}Cj}7LUGmПl#,b篛XcJ$krwV%YjUP: wVꏨv0L0kƩV_ O#NoS](ͩXNpz:Յ'ډSdpr7bV%[MC}],B^5*[4yϐۃT B%[d]VK8u%b--[WK&ΒZ*Sf]_#Y GdhpHth7rlI8j6EI*Q%I)"‘=zO'v'Zr%V6OtnϘS|N"'SҳK%35o~fu'fEp\lzzJ[ۅ,w,LIIKIi"RtRʚԁɱ!1KRW̨)?]Y*]!Y岀UU}nYoia,{FrjYy}S23{.p\߿ǝ휶p;S]֧f-w\/؞9aÅ3U!iRA*. P2OO;Dx⢓=EtlL81N6(aH$H=271F\?j*q/bFx.BYO' 8PFLj؁iDt\LLRt I?q!) ; 7/J?!49?j" 2fQ^9ْv-D ;h%u.6Z/6q`1)m@@=dȀקDT\ L2$6eYL=[Tݹ|lvt0[/(k sjo:/NlqdpQ-Jsj۬⻆-|f gDPq9Nёb$us NǻE߹ީӮVKȰpav۴=?}Hc~rJ\RO':-ɓ;x@jr80)nPL\Lj\yT7֔;nԑ>L?jnUrs)2 Q~> Q)+unq}Wryܫ~9 9:?q@.+puWߠ{jG{k'cymR-{\M'UNϝocxI :j"d1TFGHo8O%˚]qgMI]gMt_S3NKw/s8"JeOihY\$J$Q bP&s ,?GO?o!Tdg~U8|֩r[-j|g Awt Vchvxk N1V Q ty@(gT" |V{fuɗWȥ$qj5beLޓ &1mZϡF~k#IFjV/{VbFG2mUojbVIՄ5gw[hC6nBE @Bc¶$%ICDMLrdbH?ΛY&ƗNwޛ3mfj%G9:xp6Sj1|]=UyN]5@>7E81`Ϊ6j=W& ԁPRB! >!Z Ċ";"-N` O|u?_nE:_ĄAb- 3Q`p,MR3ftA]0:*M 93`zZ~:G#X[un6fF776]^`›XL,ȓx]! w#XL,CurFR #/G 1`6QfyuXiPwJU}u:ra>a|z&;@mxxh% xdD7H6]j# vz%@Dpk(4 K q 69TheqQXaX6dR}hT*DÚvTWs~PKY:jՂR0Collect 6.1//MFM CALIBRATION/MFM CALIBRATION.clt\[l\GdZh\ r/!*:\N> Jyͬ*4؉Y}B2Ȗݛ+q(i|(v&93sݳIZz&{v9߇<\?Ȩ8}tLfkwwյv!=]^}#hEE2}hB4hA,Dw#Se؟ߓ'1l淙gpz(VrUc?'ip(z}~hMiul'ۓ__߻ϾG']?`޾yu}MzFW3TL0*iU ʪZVΪz3[j#XS[-nEW}s c.m]E#}^V#_{ %F.r}1I]H+GLz7SDkJco?hts]ヒ?{:̨qSl-9+(j}_A'i1Ư4npGYM򳚚|PGl,Ɣ} xNz0ѿcjUc sNc:qC0ggiɪYܗ@k'44g@$huւsck cPQ+ViWĚz]Y<:&F58FC ?-m~yVd_fpP;)8ׁʬ|e؆Ӹ1F0nrINz|1p̣Îw:t~ڨ]c4AS4O2vFå5k673Ubϫ? YpCts.^CO0/I拡:{c7<%yT4?,˹sD:~$ O߳ȷuzK's$Ǩϙ9s5o;1\`DM d/Q.l$MvUfxL:f1:hƖ&BN@.E\We00ujYt 0}3u˒kV<ӍZA-.jgY/JN#~^wi%]:F`;>on21ֱaĎEW8}gp]Hyk'pbbqC8 1K }"G 迬s{:y-O'MyF,w5psa~(6IU6֯zl?ja֡a~A;Ye=`[wP9D3 //~+T yEm[gC['t/oW&ޘG~2o3NB|o(z8̭iVGYD\Zt:s6s p7kl3Wf5E3lmִKy3Q_z~~}.0טg`Tvs;՝3famh$+ k3tÚź<\ѹّC47_fr߬>&}_0LC;>˔6M '։2{sukXAΐr :هN>9ηJ}xT?U 3%7"x~M!>帲ﱬsϊֿNAr K! *ϱSArley5͊"[}"bqXWnmden^/pK<<(:cgix7i \|z?LB_L^ȀSۇ[za4\3@y}IY'Z;k4 iv6i#˻TSF|eܗVͶ߸c^x#x`S~R<5]C:n,X[^Ę'y݀k$Je':z?3A-?ץ+^h74(DS:m+}s61m܉f"Q d?Pt*Ht|$SCkڳAw]Gؼ݇ k5\ n7F3cտ[7}<Ab $9=9KiaKX{<1uڛ1M9C\<^b?42e #tbiT;Aٮ DZ_7/q;|0~G6ǹV.2ևsJ:bx|w4R (땏r]tGtw3uP5w &)$2e/sb_硼{s}P>Q'-.8_c3[zP1:~ DtNžD_Ho/}3sllu;xQk#Е\!M Kn#Z-j44T槉orF&<:&Emg?9V2U7ϰ}V[IHǧdyLW/ ځ3?t,{T RUP||^:yݷaG݉?&j?7o/ϕ܊h^faoO/:{?hmv޳Ү߄F1F/Icym.r^uxwnD u3lҙ%~s*' `+=*Q+0> k!XB&iְTUa uo[e;KR4OGOx6MsJvY s*/Ka~ۜU@ՙ\e/'=c`h{G=[H.f{thߣ\$a\\V;"cr8ުPK рk:Collect 6.1//MFM CALIBRATION/PK k:E@G' ;Collect 6.1//MFM CALIBRATION/Method.stpPK q`f::Sr/! Collect 6.1//MFM CALIBRATION/MethodTemplate.xlsPK Y:jՂR0 HvCollect 6.1//MFM CALIBRATION/MFM CALIBRATION.cltPK[pLCollect 6.1 Method Configuration File,MFM CALIBRATION,1,03/DD/YYYY,04:12:11,